Machine Features

● Compatible with 200mm-300mm wafers at the same time.
● High efficiency purification unit with 99.99% on 0.1UM PTFE U17 rating.
● The horizontal multi-joint type mechanical arm of JEL company can correspond to three loadports at the same time. Compared with the mechanical arm with transverse axis, it has higher cleanliness and longer maintenance-free cycle.
● Loadports of different brands can be installed based on customer requirements to ensure device reliability and correspond to E84.
● Ion generator can be configured inside the equipment to eliminate static electricity on the wafer surface.
● The equipment software has various security interlock functions, including anti-collision, anti-clip, chip drop alarm, maintenance door open interlock, etc.
● Optional OCR module for Wafer ID, corresponding to bar code, two-dimensional code, numbers and letters.
● RF ID module or barcode reading module for reading FOUP and Cassette information can be optionally installed.
● Optional installation of corresponding SECS/GEM factory communication module.
● Suitable for various special cassette of Auto FOSB and client (including metal cassette, Teflon cassette, etc.)